“The semiconductor industry is understandably risk-averse, so any new laser source must integrate seamlessly with existing EUV stepper optics and infrastructure. The ability to use a different laser ...

4 have developed a soft-X-ray/EUV microscope in the water window that achieves sub-visible-light resolution. The microscope consists of a laser-plasma source and zone-plate optics to focus the ...

ASML and Imec this week established a five-year partnership designed to enable Imec's researchers and developers access to ...

The Zeiss officials have agreed to expand their partnership with Samsung regarding their EUV technologies. Zeiss has some unique technologies for lithography optics and photomask systems that ...

There is also the question of how to generate EUV light. As mentioned above, the mirrors in the projection optics only reflect 72% of the incident EUV radiation at best. A typical projection lens ...

In both cases, the sample needs to be illuminated by EUV light. However, the diffractive imaging approach reconstructs the sample image from the diffraction pattern acquired by a camera using ...

Under the partnership, Imec will gain access to ASML's comprehensive range of advanced wafer fabricating equipment (WFE), including range-topping Twinscan NXT (DUV), Twinscan NXE (Low-NA EUV tools ...