For instance, a study introduced a dual-spring system in a capacitive MEMS accelerometer, allowing it to operate effectively across different acceleration ranges. This design increases the dynamic ...

However, as things shrink to microscopic scales, transistors don’t work well, and you often find — full circle — mechanical devices. [Breaking Taps] has an investigation of a MEMS chip.

Microelectromechanical systems (MEMS) accelerometers are compact devices that measure acceleration forces, which can be used in various applications, including consumer electronics, automotive ...

MEMS technology has redefined modern technology, leading to improved performance and innovative applications across diverse industries. Take for example an airbag, where the (microscale) accelerometer ...