Micro-Electro-Mechanical Systems (MEMS ... precise measurements[3]. Another innovative approach utilized a silicon-on-insulator (SOI) structure to create a capacitive accelerometer with improved ...
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The Micro Mechanisms in Your PhoneMEMS devices ... Today we're decapping a six axis IMU (MPU-6050, on a GY-521 breakout board, containing three accelerometers and three gyroscopes), looking at it under the SEM, printing up ...
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