Micro-Electro-Mechanical Systems (MEMS) capacitive accelerometers are small devices that measure acceleration forces. These accelerometers are widely used in various applications, including ...
Silicon carbide (SiC) has emerged as a promising material for piezoresistive sensors ... area of research involves the development of MEMS accelerometers using bulk SiC. These accelerometers ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback