microphones, proximity sensors and many more. The fabrication of microelectromechanical systems uses some of the same processes and tools used to fabricate integrated circuits (e.g., deposition, ...
Resonant Cantilever by [Pcflet01], CC BY-SA 3.0 MEMS have a wide range of applications including ink jet printers, accelerometers, gyroscopes, microphones, pressure sensors, displays, and more.
Microphones for measurement purposes can be had for a very large outlay, but here’s [Peter Riccardi] with a unit designed around an array of MEMS capsules that delivers comparable performance ...
"Digital MEMS microphones in particular are well suited to space-constrained ... is a leading analog mixed-signal foundry manufacturing silicon wafers for analog-digital integrated circuits ...