HfO2-based ferroelectric thin films have attracted significant interest for semiconductor device applications due to their compatibility with complementary metal oxide semiconductor (CMOS)...

HfO2-based thin films embedded with Ni NPs were produced by atomic layer deposition (ALD) from tetrakis (ethylmethylamino)hafnium (TEMAH) and the O2 plasma ALD process onto a TiN/Si substrate.

Sep 9, 2016 · Ferroelectricity and Curie temperature are demonstrated for epitaxial Y-doped HfO 2 film grown on (110) yttrium oxide-stabilized zirconium oxide (YSZ) single crystal using Sn-doped In 2 O 3 (ITO)...

Download scientific diagram | a) 002 Pole figure of 20 nm thick La:HfO2 derived from refined orientation distribution function; b–d) Cross sections along Ψ through the radially symmetric...

Aug 5, 2024 · A pole figure of the HZO/LSMO/STO (substrate) heterostructure is shown in Figure 2b. The radial direction represents χ, which ranges between 51° and 85°, while the azimuthal direction represents φ, which ranges between 0° and 360°.

Apr 16, 2012 · Figure 9. Pole figures for the 100 cycle DADA [(20cycles + 40 sec anneal)×5] and PDA (200 sec anneal) HfO 2 films at (a) d = 3.15 Å (monoclinic (11)) and (b) d = 2.54 Å (monoclinic (200)). Annealing was performed at 800°C.

Jan 1, 2019 · The XRD pole figure for 110 reflection from YHO-7 is illustrated in Fig. 4.1 B, together with the pole figure from YSZ 220. The pole helps to determine the crystallographic orientation by recording the intensity for all the inclination and azimuth angles with a constant diffraction angle.

The orientation texture can be analyzed from the pole figure data obtained by pole figure measurement. It is very useful and convenient to obtain a pole figure with a complete hemisphere by the in-plane pole figure measurement method where a …

Dec 7, 2021 · HfO2 thin films are ferroelectric in their orthorhombic or rhombohedral phase. The epitaxial growth of HfO2 thin films makes it possible to analyze the properties of each phase.

HfO2 is Baddeleyite-like structured and crystallizes in the orthorhombic Pca2_1 space group. The structure is three-dimensional. Hf4+ is bonded to seven O2- atoms to form a mixture of distorted edge and corner-sharing HfO7 pentagonal bipyramids.